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Comparison of short-channel effects in monolayer MoS2 based junctionless and inversion-mode field-effect transistors

机译:单层基于MoS2的无结和反转模式场效应晶体管中的短沟道效应比较

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摘要

http://www.gianlucafiori.org/articles/APL_MoS2.pdf\ud\udConventional junctionless (JL) multi-gate (MuG) field-effect transistors(FETs) require extremely scaled channels to deliver high on-state current with low short-channel effect related leakage. In this letter, using ultra-thin 2D materials (e.g., monolayer MoS2), we present comparison of short-channel effects in JL, and inversion-mode (IM) FETs. We show that JL FETs exhibit better sub-threshold slope (S.S.) and drain-induced-barrier-lowering (DIBL) in comparison to IM FETs due to reduced peak electric field at the junctions. But, threshold voltage (VT) roll-off with channel length downscaling is found to be significantly higher in JL FETs than IM FETs, due to higher source/drain controlled charges (dE/dx) in the channel. Further, we show that although VT roll-off in JL FETs improves by increasing the gate control, i.e., by scaling the oxide, or channel thickness, the sensitivity of threshold voltage on structural parameters is found out to be high.
机译:传统的无结(JL)多栅极(MuG)场效应晶体管(FET)需要极高比例的通道以提供高导通状态电流且短路电流低,而http://www.gianlucafiori.org/articles/APL_MoS2.pdf -通道效应引起的泄漏。在这封信中,我们使用超薄2D材料(例如单层MoS2),比较了JL和反转模式(IM)FET中的短沟道效应。我们显示,与IM FET相比,JL FET表现出更好的亚阈值斜率(S.S.)和漏极诱导的势垒降低(DIBL),这是因为结处的峰值电场减小了。但是,由于沟道中较高的源极/漏极控制电荷(dE / dx),在JL FET中发现随着沟道长度缩小而降低的阈值电压(VT)明显高于IM FET。此外,我们表明尽管通过增加栅极控制,即通过按比例缩小氧化物或沟道厚度来改善JL FET中的VT滚降,但发现阈值电压对结构参数的敏感性很高。

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